Multi-layer plastic/glass microfluidic systems containing electrical and mechanical functionality

TLDR

The paper proposes a fabrication approach for multi‑layer microfluidic systems combining glass and plastic materials. The method integrates hot embossing, heat staking, injection molding, microstenciling of electrodes, stereolithography, and conventional MEMS fabrication to produce and characterize multi‑layer plastic/glass microfluidic devices. The approach successfully integrates multiple plastic/glass layers into a monolithic system, incorporates electrical functionality throughout, enables microactuators such as micropumps and valves, and provides interconnects for fluid–electrical interfacing with the macro world.

Abstract

This paper describes an approach for fabricating multi-layer microfluidic systems from a combination of glass and plastic materials. Methods and characterization results for the microfabrication technologies underlying the process flow are presented. The approach is used to fabricate and characterize multi-layer plastic/glass microfluidic systems containing electrical and mechanical functionality. Hot embossing, heat staking of plastics, injection molding, microstenciling of electrodes, and stereolithography were combined with conventional MEMS fabrication techniques to realize the multi-layer systems. The approach enabled the integration of multiple plastic/glass materials into a single monolithic system, provided a solution for the integration of electrical functionality throughout the system, provided a mechanism for the inclusion of microactuators such as micropumps/valves, and provided an interconnect technology for interfacing fluids and electrical components between the micro system and the macro world.