Characterization of multilayer x-ray mirrors for the λ ⋍ 19 nm range using a laser-plasma radiation source

Abstract

A laser-plasma radiation source employing the second harmonic of a -switched Nd:YAlO3 laser (λ = 0.54 μm) has been used to study multilayer, normal-incidence, focusing x-ray mirrors. Using a Mo-Si-coated mirror (λ = 19.3 nm) as an example, we have demonstrated the feasibility of measuring the angular resolution (≤1''), the spectral shape of the resonance reflection curve, and its uniformity over an aperture 60 mm in diameter.