Applied Surface Science · 2002 · 45 citations · 13 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsMaterials CharacterizationThin FilmsOxide SemiconductorsSemiconductor Thin FilmsThin Film Electrical PropertiesThin Film Surface MorphologyThin-film DepositionThin-film MaterialsFlexible SubstratesSemiconductor Oxide Thin FilmsThickness DependenceThin Film Surface CharacterizationThin Oxide FilmsThin Oxide LayersThin-film Oxides
13