Low-temperature photoluminescence characterization of defects formation in hydrogen and helium implanted silicon at post-implantation annealing - Concepedia

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Low-temperature photoluminescence characterization of defects formation in hydrogen and helium implanted silicon at post-implantation annealing

16

Citations

22

References

2001

Year

A. I. Patuk, I. A. Shakin, T. P. Larionova, A. Ulyashin, R. Job, W. R. Fahrner, V. V. Emtsev, V. Yu. Davydov, G. A. Oganesyan

Physica B Condensed Matter

PhotoluminescenceEngineeringLow-temperature Photoluminescence CharacterizationPhysicsApplied PhysicsPost-implantation AnnealingDefects FormationDefect FormationSemiconductor Device FabricationSilicon On InsulatorOptoelectronicsSilicon Debugging

References

	Year	Citations

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