Concepedia

ITO films deposited on water-cooled flexible substrate by bias RF Magnetron Sputtering

Zhiwei Yang, Shenghao Han, Tianlin Yang, Lina Ye, Honglei Ma, Chuanfu Cheng

Applied Surface Science · 2000 · 21 citations · 13 references

DOI

Concepts

References

13

Structural Studies of Tin-Doped Indium Oxide (ITO) and In4Sn3O12

Nicolas Nadaud, Nicolas Lequeux, M. Nanot et al. · Journal of Solid State Chemistry · 1998 · 338 citations

, , +14

Electrical and optical properties of indium tin oxide thin films deposited on unheated substrates by d.c. reactive sputtering

T. Karasawa, Yutaka Miyata · Thin Solid Films · 1993 · 164 citations

, , +17

Studies on the preferred orientation changes and its influenced properties on ITO thin films

P. Thilakan, J. Kumar · Vacuum · 1997 · 90 citations

, , +13

Study of annealed indium tin oxide films prepared by rf reactive magnetron sputtering

Lijian Meng, A. Maçarico, Rodrigo Martins · Vacuum · 1995 · 89 citations

, , +14

Properties of radio-frequency magnetron sputtered ITO films without in-situ substrate heating and post-deposition annealing

Wen-Fa Wu · Thin Solid Films · 1994 · 78 citations

, , +17