Chemical structure of films grown by AlN laser ablation: an X-ray photoelectron spectroscopy study

N. Laidani, L. Vanzetti, M. Anderle, Armelle Basillais, C. Boulmer-Leborgne, J. Perrière

Surface and Coatings Technology · 1999 · 53 citations · 17 references

Concepts

References

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