Deposition of Al2O3 by resistive evaporation and thermal oxidation of Al to be applied as a transparent FET insulating layer

Alternative dielectrics to silicon dioxide for memory and logic devices

Angus I. Kingon, Jon‐Paul Maria, S. K. Streiffer · Nature · 2000 · 1.3K citations

Materials Science, Electrical Engineering, Engineering +7

Realization of a high mobility dual-gated graphene field-effect transistor with Al2O3 dielectric

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Materials Science, Graphene Nanomeshes, Electrical Engineering +10

Thin-film deposition: principles and practice

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Thin Film Physics, Engineering, Thin Film Process Technology +17

Structure and morphology of aluminium-oxide films formed by thermal oxidation of aluminium

Lars P. H. Jeurgens, Willem G. Sloof, F.D. Tichelaar et al. · Thin Solid Films · 2002 · 269 citations

Materials Science, Materials Engineering, Aluminium Nitride +9

Structural characterization of phase transition of Al2O3 nanopowders obtained by polymeric precursor method

Sergio Cava, Sérgio Mazurek Tebcherani, Ivan Alves de Souza et al. · Materials Chemistry and Physics · 2007 · 261 citations · Full text

Materials Science, Materials Engineering, Engineering +10