Multi-cathode unbalanced magnetron sputtering systems

Charged particle fluxes from planar magnetron sputtering sources

B. Window, N. Savvides · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1986 · 419 citations

Natural Sciences, Electrical Engineering, Physics +13

Microstructure modification of TiN by ion bombardment during reactive sputter deposition

I. Petrov, Lars Hultman, Ulf Helmersson et al. · Thin Solid Films · 1989 · 327 citations

Natural Sciences, Materials Engineering, Materials Science +16

Unbalanced dc magnetrons as sources of high ion fluxes

B. Window, N. Savvides · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1986 · 208 citations

Natural Sciences, Electrical Engineering, Physics +15

Unbalanced magnetron ion-assisted deposition and property modification of thin films

N. Savvides, B. Window · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1986 · 179 citations

Natural Sciences, Materials Engineering, Materials Science +17

Reactive sputtering of TiN films at large substrate to target distances

J. Musil, S. Kadlec · Vacuum · 1990 · 112 citations

Natural Sciences, Materials Engineering, Materials Science +12