THE INDUCTIVELY COUPLED RADIO FREQUENCY PLASMA

Abstract

A review is presented of recent developments in radio frequency (r.f.) induction plasma technology. The topics covered include; plasma torch developments, fundamental studies of plasma dynamics, heat and mass transfer, plasma and particle diagnostics. Current and potential applications of induction plasma technology for materials processing are described including powder spheroidization and densification, induction plasma vacuum spraying (IPVS), induction plasma reactive deposition (IPRD) and induction plasma synthesis of ultrafine powders (UFP).