Cathodic arc deposition technology

Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatings

John A. Thornton · Journal of Vacuum Science and Technology · 1974 · 2.3K citations

Natural Sciences, Materials Engineering, Materials Science +17

Analysis of the Electrode Products Emitted by dc Arcs in a Vacuum Ambient

William D. Davis, H. Craig Miller · Journal of Applied Physics · 1969 · 544 citations

Engineering, Electrical Engineering, Physics +10

Erosion and ionization in the cathode spot regions of vacuum arcs

C. W. Kimblin · Journal of Applied Physics · 1973 · 475 citations

Natural Sciences, Materials Science, Physics +15

Components of cathode erosion in vacuum arcs

J.E. Daalder · Journal of Physics D Applied Physics · 1976 · 369 citations

Natural Sciences, Physics, Electrochemistry +14

Mechanisms of reactive sputtering of titanium nitride and titanium carbide II: Morphology and structure

J.‐E. Sundgren, B.-O. Johansson, Susanne Karlsson et al. · Thin Solid Films · 1983 · 275 citations

Natural Sciences, Materials Engineering, Materials Science +16