Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 10 citations · 5 references
EngineeringComputer EngineeringElectrical EngineeringActuatorsMicroelectromechanical SystemsMicroelectronicsAdaptive OpticsCmos Circuit DesignElectrostatic ActuationElectrostatic ActuatorsIntegrated OpticsMems DesignAdaptive Optics ActuatorsAdaptive Optics System DesignChannelizationCmos ScalingElectrostatic Mems ActuatorsSizeSpeedWavefront Correction
As the spatial resolution, stroke and speed requirements for advanced adaptive optics applications increase, the addressing of large numbers of electrostatic actuators for wavefront correction becomes more demanding. In this paper, we review the requirements, limits and the challenges of electrically addressing a large array of electrostatic actuators using an integrated CMOS technology. We also review the issues of high-rate data sourcing, signal channelization and multiplexing, and electronics integration (VLSI) with an eye on system power and size requirements. In examining the various CMOS technologies, we find that a broadly applicable 40V technology is currently available. Higher voltages are also available, albeit with additional design restrictions. Finally, we report preliminary work on a specific addressing scheme for a vertically-integrated VLSI/electrostatic MEMS prototype spatial phase modulator with 288x256 pixels at framing rates of 2kHz.
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Stabilization of electrostatically actuated mechanical devices
J.I. Seeger, S. B. Crary · 2002 · 182 citations