Preparation of transparent and conductive Al-doped ZnO thin films by ECR plasma enhanced CVD

A. Martı́n, J.P. Espinós, A. Justo, Juan P. Holgado, F. Yubero, Agustı́n R. González-Elipe

Surface and Coatings Technology · 2002 · 70 citations · 19 references

Concepts

References

19