Journal of Scientific Instruments · 1964 · 20 citations · 4 references
EngineeringElectrical EngineeringMaterials ScienceMicroelectronicsSemiconductor DevicesSemiconductor MaterialsDevice CharacterizationDevice ModelingElectrical ConductivitySemiconductor Device MaterialsSemiconductor PhysicsSemiconductor SurfacesConformal MappingElectric Field DistributionElectric Field IntensityResistivity MeasurementSemiconductor CharacterizationSemiconductor Device CharacterizationSheet ResistanceSheet Resistance Measurement
The conformal transformation of a square into a circle is used in order to solve the problem of electric field distribution associated with four-point resistivity measurements on square wafers. Numerical results are presented in a form suitable for practical use. The previously reported results of Keywell and Dorosheski are shown to be incorrect.
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