Journal of the European Ceramic Society · 2000 · 41 citations · 14 references
Natural SciencesChemistryMaterials ScienceReaction EngineeringSemiconductor MaterialsSolid-state ChemistryChemical Vapor DepositionPowder ProcessingSilicon MaterialsCarbide SynthesisChemical Vapor Deposition MaterialsChemical Vapor Deposition PrecursorsSilicon CarbideSilicon Carbide (Sic) MaterialsSilicon Chemical Vapor DepositionVapour Diffusion
14