Microsystem Technologies · 2010 · 22 citations · 2 references
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Micro gear pumps for dosing of viscous fluids
J. Döpper, Markus Clemens, W. Ehrfeld et al. · Journal of Micromechanics and Microengineering · 1997 · 75 citations
Characterization of gear pumps fabricated by LIGA
K. Deng, A.S. Dewa, D.C. Ritter et al. · Microsystem Technologies · 1998 · 11 citations