Micro gear pumps for dosing of viscous fluids

Abstract

Gear pumps using micro gear wheels with diameters of 596 and and a height of have been realized at IMM by means of a combination of LIGA technology and precision engineering. Using oil as pumping medium the pumps achieve back pressures of more than 1200 hPa and flow rates of up to . The self-filling pumps tolerate air bubbles and particles contained in the working medium. The gear pumps displace 82 and 213 nl respectively per revolution, i.e. they offer the possibility of very precise dosing of viscous fluids, such as oil.