Concepedia

Characterization of gear pumps fabricated by LIGA

K. Deng, A.S. Dewa, D.C. Ritter, Charles C. Bonham, H. Guckel

Microsystem Technologies · 1998 · 11 citations · 2 references

DOI

Concepts

References

2

Metal micromechanisms via deep X-ray lithography, electroplating and assembly

H. Guckel, Todd R. Christenson, K.J. Skrobis · Journal of Micromechanics and Microengineering · 1992 · 34 citations

, , +17

Development of LIGA-fabricated, self-priming, in-line gear pumps

A.S. Dewa, K. Deng, D.C. Ritter et al. · 2002 · 20 citations

, , +12