Optical system for measuring the profiles of super-smooth surfaces

Optical heterodyne profilometry

Gary E. Sommargren · Applied Optics · 1981 · 246 citations

Natural Sciences, Physics, Optics +16

Stylus profiling instrument for measuring statistical properties of smooth optical surfaces

Jean M. Bennett, J. Dancy · Applied Optics · 1981 · 238 citations

Natural Sciences, Materials Engineering, Materials Science +17

Surface profile measurement with a scanning differential ac interferometer

G. Makosch, B. Drollinger · Applied Optics · 1984 · 57 citations

Engineering, Mechatronics Engineering, Equipment +16

Optical Heterodyne Profilometer

Chao Huang · Optical Engineering · 1984 · 55 citations

Natural Sciences, Materials Science, Physics +16

Interferometry as a measuring tool

J.N. Butters · Optics & Laser Technology · 1971 · 37 citations

Engineering, Electrical Engineering, Instrumentation +11