Zirconium dioxide thin films deposited by ALE using zirconium tetrachloride as precursor

Zirconia-based solid electrolytes: microstructure, stability and ionic conductivity

S. P. S. Badwal · Solid State Ionics · 1992 · 538 citations

Natural Sciences, Chemistry, Materials Science +14

Growth of titanium dioxide thin films by atomic layer epitaxy

Mikko Ritala, Markku Leskelä, E. Nykänen et al. · Thin Solid Films · 1993 · 307 citations

Natural Sciences, Materials Engineering, Materials Science +14

Titanium isopropoxide as a precursor in atomic layer epitaxy of titanium dioxide thin films

Mikko Ritala, Markku Leskelä, Lauri Niinistö et al. · Chemistry of Materials · 1993 · 295 citations

Natural Sciences, Chemistry, Materials Science +8

Modification of the optical and structural properties of dielectric ZrO2 films by ion-assisted deposition

Philip Martin, R. P. Netterfield, W. G. Sainty · Journal of Applied Physics · 1984 · 242 citations

Natural Sciences, Materials Engineering, Materials Science +17

Optical determination of the film thicknesses in multilayer thin film structures

Markku Ylilammi, Timo Ranta-aho · Thin Solid Films · 1993 · 226 citations

Natural Sciences, Materials Engineering, Materials Science +14