Nature of defects and their relationship with the growth and properties of diamond films

Abstract

We present results for the lattice defects in diamond films and discuss interplay between the defects and growth rate of the films grown by chemical vapor deposition and dc plasma arc jet. We identify the nature of the defects and present defect depth profiles for films grown under different conditions of these two techniques. Defect density and film properties change significantly with growth parameters and the growth rate is related to defects in the film.