Applied Surface Science · 2011 · 27 citations · 32 references
Natural SciencesMaterials EngineeringMaterials ScienceSurface EngineeringSurface ScienceThin FilmsCoating ProcessesCoating TechnologyCoatingsPlasma-surface InteractionsSurface CoatingsThin-film MaterialsAnti-reflection CoatingsAntireflection CoatingsMulti-layer CoatingsMultilayer MaterialsPlasma-assisted Coating
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Control of reactive sputtering processes
W.D. Sproul, D.J. Christie, D.C. Carter · Thin Solid Films · 2005 · 395 citations
Engineering, Manufacturing Engineering, Materials Processing +5