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Effect of oxygen partial pressure on the structural and optical properties of dc sputtered ITO thin films

Materials ScienceSurface CharacterizationOptical MaterialsEngineeringPhysicsOptical PropertiesOxide ElectronicsSurface ScienceApplied PhysicsIto Thin FilmsThin FilmsOptoelectronicsChemical Vapor DepositionThin Film ProcessingOxygen Partial Pressure