Shapes of Etch Hillocks and Pits and Their Correlation with Measured Etch Rates

Abstract

The factors which govern the occurrence and stability of etch hillocks and pits have been examined. Batterman's original analysis has been reconsidered and extended to account for all the crystallographic facets of etch hillocks and pits produced by a dilute hydrogen peroxide-hydrofluoric acid etchant on germanium surfaces. The treatment should be valid for other etchants and materials but suitable data are not available.