Concepedia
Microelectronic Engineering · 2012 · 12 citations · 6 references
Materials ScienceHydrogen ChlorideChemical EngineeringEngineeringMicrofabricationSurface ScienceApplied PhysicsElectronic PackagingMicroelectronicsPlasma Etching
6
The science and engineering of microelectronic fabrication
Choice Reviews Online · 1996 · 648 citations
Engineering, Common Mems, Ion Implantation Systems +18
On the Mechanism of ITO Etching: The Specificity of Halogen Acids
M.J. de Wild Scholten, J. E. A. M. van den Meerakker · Journal of The Electrochemical Society · 1993 · 74 citations
Materials Science, Dc Magnetron Sputtering, Chemical Engineering +15
On the Mechanism of ITO Etching in Halogen Acids: The Influence of Oxidizing Agents
J. E. A. M. van den Meerakker, P. C. Baarslag, M.J. de Wild Scholten · Journal of The Electrochemical Society · 1995 · 62 citations
Indium Oxide, Engineering, Thin Film Process Technology +21
Dry etching characteristics of ITO thin films deposited on plastic substrates
Y.J. Lee, J. W. Bae, H.R. Han et al. · Thin Solid Films · 2001 · 28 citations
Materials Science, Materials Engineering, Electrical Engineering +13
High Temperature Reactive Ion Etching of Indium‐Tin Oxide with HBr and CH 4 Mixtures
Yue Kuo, Tsong L. Leo Tai · Journal of The Electrochemical Society · 1998 · 19 citations
Materials Science, Chemical Engineering, Plasma Electronics +15