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Characterization and properties of quaternary Mo–Si–C–N coatings synthesized by magnetron sputtering technique

Materials ScienceMaterials EngineeringMagnetic PropertiesEngineeringSurface ScienceApplied PhysicsQuaternary Mo–si–c–n CoatingsThin Film Process TechnologyThin FilmsMagnetron Sputtering TechniqueChemical Vapor DepositionThin Film Processing