Journal of Non-Crystalline Solids · 2003 · 18 citations · 21 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsMaterials ChemistrySemiconductor MaterialsDopingIon ImplantationOxide SemiconductorsSemiconductor Device MaterialsSilicon MaterialsSurface PassivationPassivation MechanismsSilica-based MaterialsSilicon DioxideSilicon DopingSilicon Passivation
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