Applied Physics Letters · 2013 · 25 citations · 18 references
EngineeringElectrical EngineeringMaterials ScienceMetrologyMicroelectromechanical SystemsOpticsElectromechanical SystemsMechanical MeasurementMems CharacterizationMicrofabrication MetrologyMechanical Measurement SystemsMems MetrologyMetrology Of Microelectromechanical SystemsStructure Performance Measurement
Views Icon Views Article contents Figures & tables Video Audio Supplementary Data Peer Review Share Icon Share Twitter Facebook Reddit LinkedIn Tools Icon Tools Reprints and Permissions Cite Icon Cite Search Site Citation Chunxin Xu, Yidong Tan, Shulian Zhang, Shijie Zhao; The structure measurement of micro-electro-mechanical system devices by the optical feedback tomography technology. Appl. Phys. Lett. 3 June 2013; 102 (22): 221902. https://doi.org/10.1063/1.4807283 Download citation file: Ris (Zotero) Reference Manager EasyBib Bookends Mendeley Papers EndNote RefWorks BibTex toolbar search Search Dropdown Menu toolbar search search input Search input auto suggest filter your search All ContentAIP Publishing PortfolioApplied Physics Letters Search Advanced Search |Citation Search
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Natural Sciences, Biomedical Engineering, Biomedical Optics +14