Concepedia

Investigation of ion impact desorption of atoms and molecules by low energy ion scattering (ISS)

E. Taglauer, U. Beitat, W. Heiland

Nuclear Instruments and Methods · 1978 · 37 citations · 8 references

DOI

Concepts

References

8

Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets

Peter Sigmund · Physical Review · 1969 · 3.5K citations

, , +13

Sputtering of chemisorbed gas (nitrogen on tungsten) by low-energy ions

Harold F. Winters, Peter Sigmund · Journal of Applied Physics · 1974 · 318 citations

, , +17

Sputtering of adsorbed layers by ion bombardment

E. Taglauer, U. Beitat, G. Marin et al. · Journal of Nuclear Materials · 1976 · 61 citations

, , +14

Study of the sputtering of adsorbates by low energy ions (O on Ni)

E. Taglauer, G. Marin, W. Heiland et al. · Surface Science · 1977 · 54 citations

, , +10

The surface cleanliness of 316 L + N stainless steel studied by SIMS and AES

A. G. Mathewson · Vacuum · 1974 · 45 citations

, , +11