Concepedia

Sputtering of adsorbed layers by ion bombardment

E. Taglauer, U. Beitat, G. Marin, W. Heiland

Journal of Nuclear Materials · 1976 · 61 citations · 11 references

DOI

Concepts

References

11

Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets

Peter Sigmund · Physical Review · 1969 · 3.5K citations

, , +13

Computer simulation of atomic-displacement cascades in solids in the binary-collision approximation

Mark T. Robinson, Ian M. Torrens · Physical review. B, Solid state · 1974 · 1.6K citations

, , +17

Sputtering Yields for Low Energy He+-, Kr+-, and Xe+-Ion Bombardment

Duane Rosenberg, G. K. Wehner · Journal of Applied Physics · 1962 · 431 citations

, , +5

Plasma physics and controlled nuclear fusion research 1974

B. Lehnert · Nuclear Instruments and Methods · 1975 · 428 citations

, , +11

Sputtering of chemisorbed gas (nitrogen on tungsten) by low-energy ions

Harold F. Winters, Peter Sigmund · Journal of Applied Physics · 1974 · 318 citations

, , +17