Natural SciencesMaterials EngineeringMaterials ScienceMaterials CharacterizationMicrowave EngineeringCrack AssessmentDefect CharacterizationMicrowave MeasurementsScanning Probe MicroscopySuper-resolution MicroscopySurface MicroscopyCrack DetectionCracksHigh-resolution Surface ImagingMetal InspectionMicrowave DiagnosticsMicrowave MetrologySurface Crack InspectionSurface Defect Imaging
A microwave scanning microscope capable of detecting and locating defects in a metal surface is described. Using a technique to obtain super-resolution, previously described, the instrument has proved capable of resolving gratings with periods of λ/200, and of detecting fatigue cracks less than 2μ in width.
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