Concepedia

Incorporation of polyhydride bonding groups into thin films of hydrogenated amrophous silicon (a-;Si:H)

G. Lucovsky, B. N. Davidson, Gregory N. Parsons, C. Wang

Journal of Non-Crystalline Solids · 1989 · 30 citations · 6 references

DOI

Concepts

References

6

Structural interpretation of the vibrational spectra of<mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" display="inline"><mml:mi>a</mml:mi></mml:math>-Si: H alloys

G. Lucovsky, R. J. Nemanich, J. C. Knights · Physical review. B, Condensed matter · 1979 · 810 citations

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Defects in plasma-deposited a-Si: H

J. C. Knights, G. Lucovsky, R. J. Nemanich · Journal of Non-Crystalline Solids · 1979 · 244 citations

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Phonons in polysilane alloys

W. B. Pollard, G. Lucovsky · Physical review. B, Condensed matter · 1982 · 136 citations

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Optical and electrical properties of a-Si:H films grown by remote plasma enhanced chemical vapor deposition (RPECVD)

Gregory N. Parsons, D. V. Tsu, G. Lucovsky · Journal of Non-Crystalline Solids · 1987 · 36 citations

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Properties of intrinsic and doped <i>a</i>-Si:H deposited by remote plasma enhanced chemical vapor deposition

Gregory N. Parsons, D. V. Tsu, G. Lucovsky · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1988 · 25 citations · Full text

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