Publication | Closed Access
Effect of thermal oxidation on indentation and scratching of single-crystal silicon carbide on microscale
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Citations
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References
2000
Year
Materials ScienceEngineeringMicrofabricationMechanical EngineeringApplied PhysicsSingle-crystal Silicon CarbideCarbideThermal OxidationStructural CeramicMicroelectronicsMicrostructure
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