Y-Ba-Cu-O Thin Film on Si Substrate

Abstract

Superconducting Y-Ba-Cu-O thin films have been prepared by RF magnetron sputtering on Si(100) substrate with a buffer layer of ZrO 2 or MgO. The film with a ZrO 2 buffer layer exhibited a superconductive transition with zero resistance at 82 K. X-ray diffraction patterns indicated a preferential orientation where c-axes were perpendicular to the substrate.