Microelectronic Engineering · 1992 · 13 citations · 4 references
EngineeringElectrical EngineeringMicroelectronicsMicrowave EngineeringSemiconductor DevicesElectron Beam PhysicsHigh-frequency Semiconductor DevicesIntegrated Circuit DesignIntegrated Circuit FabricationMicrowave Integrated CircuitsRadio-frequency Integrated CircuitsElectron Beam FocusingMillimeter-wave Integrated CircuitsRadio-frequency Integrated Circuit Design
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A 100-femtosecond electron beam blanking system
J.-N. Fehr, W. Reiners, L.J. Balk et al. · Microelectronic Engineering · 1990 · 13 citations