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Very high frequency SAW devices based on nanocrystalline diamond and aluminum nitride layered structure achieved using e-beam lithography

Materials ScienceMaterials EngineeringDiamond-like CarbonEngineeringElectron-beam LithographyNanocrystalline DiamondMicrofabricationNanotechnologyNanoelectronicsFabrication TechniqueApplied PhysicsBeam LithographyMicroelectronicsE-beam LithographyNanolithography Method