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Highly phosphorus-doped polysilicon films with low tensile stress for surface micromachining using POCl3 diffusion doping

Materials SciencePhosphorus-doped Polysilicon FilmsEngineeringMicromachinesMicrofabricationSurface ScienceApplied PhysicsSemiconductor Device FabricationPocl3 DiffusionLow Tensile StressThin Film Process TechnologySilicon On InsulatorMicroelectronicsThin Film Processing