Applied Surface Science · 2014 · 47 citations · 25 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsMicroelectronicsThin FilmsCarrier TransportChemical Vapor DepositionMetal-oxide-semiconductor Field-effect TransistorsOxide SemiconductorsSemiconductor Thin FilmsThin-film TransistorsChemical Vapor Deposition MaterialsChemical Vapor Deposition PrecursorsMobility OptimizationOxide Thin-film TransistorsSemiconductor Oxide Thin FilmsThin Oxide FilmsThin Oxide Layers
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