A new method for hard coatings: ABS TM (arc bond sputtering)

Charged particle fluxes from planar magnetron sputtering sources

B. Window, N. Savvides · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1986 · 419 citations

Natural Sciences, Electrical Engineering, Physics +13

Microstructure modification of TiN by ion bombardment during reactive sputter deposition

I. Petrov, Lars Hultman, Ulf Helmersson et al. · Thin Solid Films · 1989 · 327 citations

Natural Sciences, Materials Engineering, Materials Science +16

Unbalanced dc magnetrons as sources of high ion fluxes

B. Window, N. Savvides · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1986 · 208 citations

Natural Sciences, Electrical Engineering, Physics +15

Unbalanced magnetron ion-assisted deposition and property modification of thin films

N. Savvides, B. Window · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1986 · 179 citations

Natural Sciences, Materials Engineering, Materials Science +17

Microstructures of TiN films grown by various physical vapour deposition techniques

G. Håkansson, Lars Hultman, J.‐E. Sundgren et al. · Surface and Coatings Technology · 1991 · 157 citations

Natural Sciences, Materials Engineering, Materials Science +14