Publication | Closed Access
Reproducible defect etching of SiC single crystals
37
Citations
7
References
2004
Year
Materials EngineeringMaterials ScienceEngineeringApplied PhysicsSemiconductor Device FabricationSic Single CrystalsPlasma EtchingCarbide
| Year | Citations | |
|---|---|---|
Page 1
Page 1