Concepedia
Current Opinion in Solid State and Materials Science · 2002 · 25 citations · 42 references
Natural SciencesChemistryMaterials ScienceAnalytical ChemistryPhysical ChemistrySensorsChemical SensorsChemical Vapor DepositionNanowiresChemical Vapor Deposition MaterialsChemical Vapor Deposition PrecursorsReactive Chemical Detection
42
Cavity ring-down spectroscopy: Experimental schemes and applications
Giel Berden, Rudy Peeters, Gerard Meijer · International Reviews in Physical Chemistry · 2000 · 1K citations
Natural Sciences, Chemistry, Physics +17
Formation of Silicon-Based Thin Films Prepared by Catalytic Chemical Vapor Deposition (Cat-CVD) Method
Hideki Matsumura · Japanese Journal of Applied Physics · 1998 · 230 citations · Full text
Natural Sciences, Materials Engineering, Materials Science +17
Production of high-quality amorphous silicon films by evaporative silane surface decomposition
James R. Doyle, Robert M. Robertson, G.H. Lin et al. · Journal of Applied Physics · 1988 · 199 citations
Engineering, Materials Engineering, Materials Science +17
Mono- and disilicon radicals in silane and silane-argon dc discharges
Robert M. Robertson, Alan Gallagher · Journal of Applied Physics · 1986 · 196 citations
Natural Sciences, Chemistry, Materials Science +7
Appearance mass spectrometry of neutral radicals in radio frequency plasmas
H. Sugai, Hirotaka Toyoda · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1992 · 170 citations