Auger electron spectroscopy studies of I–III–VI2 chalcopyrite compounds

Abstract

Auger electron spectroscopy (AES) spectra are presented for Cu ternary chalcopyrite compounds. CuInS2, CuInSe2, and CuInTe2 thin films, bulk polycrystalline, and single-crystal samples are examined and their AES spectra are compared. The validity of quantitative analysis methods [(1) calibration with Ag-standard, (2) utilization of sensitivity factors, and (3) calibration with specific ternary standards] is examined and the results are compared. Consistent results are obtained for polycrystalline (bulk and thin film) samples, but not for the single-crystal cases. It is found that peak width variations must be considered in the single-crystal data which vary due to diffraction channeling effects. Calculations, taking these variations into account, yield the expected results.