Concepedia

Influence of particle energies on the properties of magnetron sputtered tungsten films

C. Paturaud, Géraldine Farges, M.C. Sainte Catherine, J. Machet

Surface and Coatings Technology · 1998 · 31 citations · 12 references

DOI

Concepts

References

12

Scherrer after sixty years: A survey and some new results in the determination of crystallite size

J. I. Langford, A. J. C. Wilson · Journal of Applied Crystallography · 1978 · 3.8K citations

, , +14

Revised structure zone model for thin film physical structure

R. Messier, Anupam Giri, R. Roy · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1984 · 945 citations

, , +12

Energy dependence of the ion-induced sputtering yields of monatomic solids

N. Matsunami, Yasunori Yamamura, Yukikazu Itikawa et al. · Atomic Data and Nuclear Data Tables · 1984 · 801 citations

, , +7

Atomic and Molecular Radiation Physics

L. G. Christophorou, Yong Kyun Kim, U. Fano · American Journal of Physics · 1972 · 515 citations

, , +11

Polycrystalline TiN films deposited by reactive bias magnetron sputtering: Effects of ion bombardment on resputtering rates, film composition, and microstructure

I. Petrov, Lars Hultman, J.‐E. Sundgren et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1992 · 238 citations

, , +15