Publication | Closed Access
Influence of particle energies on the properties of magnetron sputtered tungsten films
31
Citations
12
References
1998
Year
Materials ScienceMagnetismMaterials EngineeringParticle EnergiesEngineeringPhysicsSurface ScienceCondensed Matter PhysicsApplied PhysicsTungsten FilmsVacuum DeviceThin FilmsChemical Vapor DepositionThin Film Processing
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