Vacuum · 2009 · 170 citations · 27 references
Natural SciencesMaterials EngineeringMaterials ScienceSurface EngineeringSurface ScienceThin FilmsCoating ProcessesCoating TechnologyCoatingsSurface CoatingsSurface HardeningThin-film DepositionCoating DefectsHard CoatingsPvd CoatingsSurface Defect FormationThin-film Growth Mechanisms
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Physics of arcing, and implications to sputter deposition
André Anders · Thin Solid Films · 2005 · 105 citations