Concepedia

Computer simulation of ion sputtering of polyatomic multilayered targets

B.Ja. Ber, Vladimir S. Kharlamov, Yu.A. Kudrjavtsev, A. Merkulov, Yu. V. Trushin

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1997 · 14 citations · 7 references

DOI

Concepts

References

7

Computer simulation of atomic-displacement cascades in solids in the binary-collision approximation

Mark T. Robinson, Ian M. Torrens · Physical review. B, Solid state · 1974 · 1.6K citations

, , +17

Sputtering studies with the Monte Carlo Program TRIM.SP

J.P. Biersack, W. Eckstein · Applied Physics A · 1984 · 916 citations

, , +8

Tridyn-binary collision simulation of atomic collisions and dynamic composition changes in solids

W. Möller, W. Eckstein, J.P. Biersack · Computer Physics Communications · 1988 · 607 citations

, , +16

The binary collision approximation: Background and introduction

M. T. Robinson · Radiation effects and defects in solids · 1994 · 90 citations

, , +14

The subthreshold radiation effects in semiconductors

Arnold Kiv, O. R. Niyazova · physica status solidi (a) · 1975 · 62 citations

, , +12