Concepedia

Optical properties of amorphous and polycrystalline tantalum oxide thin films measured by spectroscopic ellipsometry from 0.03 to 8.5 eV

E. Franke, M. Schubert, Chris Trimble, Michael J. DeVries, John A. Woollam

Thin Solid Films · 2001 · 34 citations · 29 references

DOI

Concepts

References

29

<i>Ellipsometry and Polarized Light</i>

R. M. A. Azzam, N. M. Bashara, Stanley S. Ballard · Physics Today · 1978 · 4.3K citations

, , +13

Ellipsometry and Polarized Light

L. Cox · Optica Acta International Journal of Optics · 1978 · 1.9K citations

, , +9

Ellipsometric determination of optical constants for silicon and thermally grown silicon dioxide via a multi-sample, multi-wavelength, multi-angle investigation

Craig M. Herzinger, Blaine Johs, William A. McGahan et al. · Journal of Applied Physics · 1998 · 1.1K citations

, , +17

Investigation of effective-medium models of microscopic surface roughness by spectroscopic ellipsometry

D. E. Aspnes, J. B. Theeten, F. Hottier · Physical review. B, Condensed matter · 1979 · 1K citations

, , +17

Infrared dielectric anisotropy and phonon modes of sapphire

M. Schubert, Tom Tiwald, Craig M. Herzinger · Physical review. B, Condensed matter · 2000 · 375 citations

, , +17