Journal of Physics D Applied Physics · 2013 · 33 citations · 23 references
EngineeringMechanical EngineeringActuatorsMicrofabricationVibrationElectrostatic ActuationElectrostatic ActuatorsElectrostatic ResonatorsHydrostatic PressurePressure SensitivityResonanceResonant Electrostatic ActuationResonant FrequencySurface StressSurface Stress Analysis
Interaction of transverse pressure and inplane internal stresses on bi-stability of electrostatically rectangular microplates Shivdayal Kumar and
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