Concepedia

Publication | Closed Access

Plasma enhanced atomic layer deposition of copper: A comparison of precursors

DOI

20

Citations

29

References

2013

Year

Dirk J. Hagen, J.P. Connolly, Roger Nagle, Ian M. Povey, S. Rushworth, Patrick Carolan, P. Ma, Martyn E. Pemble
Surface and Coatings Technology

References

YearCitations

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