Concepedia
Surface and Coatings Technology · 2013 · 21 citations · 29 references
Natural SciencesMaterials EngineeringMaterials ScienceMetallurgySurface ScienceThin FilmsAlloysAtomic Layer DepositionCoatingsMetalsPowder MetallurgyThin-film DepositionCopper DepositionPlasma-enhanced Atomic Layer DepositionPlasma-enhanced Deposition
29
Size-dependent resistivity of metallic wires in the mesoscopic range
W. Steinhögl, G. Schindler, G. Steinlesberger et al. · Physical review. B, Condensed matter · 2002 · 533 citations
Natural Sciences, Materials Science, Physics +17
Synthesis and Characterization of Volatile, Thermally Stable, Reactive Transition Metal Amidinates
Booyong S. Lim, Antti Rahtu, Jin‐Seong Park et al. · Inorganic Chemistry · 2003 · 297 citations
Natural Sciences, Chemistry, Materials Science +12
Size-Dependent Resistivity in Nanoscale Interconnects
D. Josell, Sywert Brongersma, Zsolt Tökei · Annual Review of Materials Research · 2009 · 284 citations
Natural Sciences, Electrical Engineering, Physics +17
Atomic Layer Deposition of Ultrathin Copper Metal Films from a Liquid Copper(I) Amidinate Precursor
Zhengwen Li, Antti Rahtu, Roy G. Gordon · Journal of The Electrochemical Society · 2006 · 214 citations
Natural Sciences, Materials Engineering, Materials Science +17
Controlled Growth of TaN, Ta<sub>3</sub>N<sub>5</sub>, and TaO<i><sub>x</sub></i>N<i><sub>y</sub></i> Thin Films by Atomic Layer Deposition
Mikko Ritala, Pia Kalsi, Diana Riihelä et al. · Chemistry of Materials · 1999 · 158 citations