Optical three-dimensional metrology with structured illumination

Abstract

A variety of techniques have been developed to measure the three-dimensional shape of an object using structured illumination. The measurement of objects with diffusely reflecting surfaces by means of projected patterns can be considered a standard technique. Also more recently, methods for the measurement of specularly reflecting or transparent surfaces by evaluation of the images of regular patterns have been published. In this paper, we suggest a systematic treatment of all of these methods as generalized active or passive triangulation techniques.