The new mechanism of sputtering with cluster ion beams

Molecular dynamics simulation of cluster ion bombardment of solid surfaces

Isao Yamada · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1995 · 101 citations

Cluster Science, Engineering, Physics +11

Angular distributions of the particles sputtered with Ar cluster ions

Noriaki Toyoda, Hiroaki Kitani, N. Hagiwara et al. · Materials Chemistry and Physics · 1998 · 65 citations

Engineering, Physics, Natural Sciences +8

Historical milestones and future prospects of cluster ion beam technology

Isao Yamada · Applied Surface Science · 2014 · 59 citations

Electrical Engineering, Ion Implantation, Engineering +7

Design and investigation of gas cluster ion accelerator

V. S. Chernysh, Yu. A. Ermakov, A.E. Ieshkin · Vacuum · 2012 · 38 citations

Electrical Engineering, Engineering, Instrumentation +4

Development of Cu Etching Using O₂ Cluster Ion Beam under Acetic Acid Gas Atmosphere

Takanori Suda, Noriaki Toyoda, Ken‐ichi Hara et al. · Japanese Journal of Applied Physics · 2012 · 16 citations

Materials Science, Chemical Engineering, Engineering +12