Surface and Coatings Technology · 2005 · 41 citations · 7 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials CharacterizationSurface ScienceThin FilmsMetalsThin Film Electrical PropertiesThin-film DepositionThin-film MaterialsMagnetron SputteringNbn Thin FilmsNitride Thin FilmsNitrides Thin FilmsThin Film Deposition Materials
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Yoshihiro Tanaka, Turgut M. Gür, M. K. Kelly et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1992 · 107 citations
Natural Sciences, Materials Engineering, Materials Science +17